diff --git a/internal/cache/cache.go b/internal/cache/cache.go
index b396da486..48b175df1 100644
--- a/internal/cache/cache.go
+++ b/internal/cache/cache.go
@@ -28,7 +28,7 @@ const fileMode = 0644
 
 func readVersion(dir string) (v uint, err error) {
 	buf, err := ioutil.ReadFile(filepath.Join(dir, "version"))
-	if os.IsNotExist(err) {
+	if errors.Is(err, os.ErrNotExist) {
 		return 0, nil
 	}
 
@@ -61,13 +61,13 @@ func writeCachedirTag(dir string) error {
 
 	tagfile := filepath.Join(dir, "CACHEDIR.TAG")
 	_, err := fs.Lstat(tagfile)
-	if err != nil && !os.IsNotExist(err) {
+	if err != nil && !errors.Is(err, os.ErrNotExist) {
 		return errors.WithStack(err)
 	}
 
 	f, err := fs.OpenFile(tagfile, os.O_CREATE|os.O_EXCL|os.O_WRONLY, fileMode)
 	if err != nil {
-		if os.IsExist(errors.Cause(err)) {
+		if errors.Is(err, os.ErrExist) {
 			return nil
 		}
 
@@ -121,7 +121,7 @@ func New(id string, basedir string) (c *Cache, err error) {
 	// create the repo cache dir if it does not exist yet
 	var created bool
 	_, err = fs.Lstat(cachedir)
-	if os.IsNotExist(err) {
+	if errors.Is(err, os.ErrNotExist) {
 		err = fs.MkdirAll(cachedir, dirMode)
 		if err != nil {
 			return nil, errors.WithStack(err)
@@ -179,11 +179,10 @@ func validCacheDirName(s string) bool {
 // listCacheDirs returns the list of cache directories.
 func listCacheDirs(basedir string) ([]os.FileInfo, error) {
 	f, err := fs.Open(basedir)
-	if err != nil && os.IsNotExist(errors.Cause(err)) {
-		return nil, nil
-	}
-
 	if err != nil {
+		if errors.Is(err, os.ErrNotExist) {
+			err = nil
+		}
 		return nil, err
 	}
 
diff --git a/internal/cache/file.go b/internal/cache/file.go
index 7f6a4d8d2..0db1275a3 100644
--- a/internal/cache/file.go
+++ b/internal/cache/file.go
@@ -99,7 +99,7 @@ func (c *Cache) Save(h restic.Handle, rd io.Reader) error {
 	finalname := c.filename(h)
 	dir := filepath.Dir(finalname)
 	err := fs.Mkdir(dir, 0700)
-	if err != nil && !os.IsExist(err) {
+	if err != nil && !errors.Is(err, os.ErrExist) {
 		return err
 	}